Terrace-width-induced domain transition on vicinal Si(100) studied with microprobe diffraction

X. Tong, Peter Bennett

Research output: Contribution to journalArticlepeer-review

84 Scopus citations

Abstract

We have used microprobe RHEED and a convex curved substrate to study the terrace-width dependence of equilibrium surface structures on vicinal Si(001). We observe a transition from double to single domains of the 2×1 reconstruction in periodic [110] step arrays that occurs gradually over a range of miscut angle from 0°to 5°, and is independent of temperature over the measured range of 500800°C. Possible mechanisms for this transition and its relation to a transition in step heights are described.

Original languageEnglish (US)
Pages (from-to)101-104
Number of pages4
JournalPhysical Review Letters
Volume67
Issue number1
DOIs
StatePublished - Jan 1 1991

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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