Abstract

In this paper, we present the analysis of temperature effects on a zinc oxide (ZnO)-based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments. Q up to 120, an improvement of at least 8× greater than state-of-the-art devices in liquids, is achieved by integrating a microfluidic channel with thickness comparable to the acoustic wavelength in the FBAR. However, the FBAR has a significant temperature sensitivity, which degrades Q and shifts its resonant frequency, resulting in undesirable false-positive/negative responses. To minimize the temperature sensitivity, we analyze sources of temperature effects and characterize FBAR's resonant frequency in a Pierce oscillator. The frequency shift is compensated by tuning the supply voltage of the oscillator, achieving a large tunability of -4300 ppm/V. Measurements demonstrate that Q variation is well controlled within -2.5% per centigrade for a FBAR with a channel thickness of 3.9 μm while the temperature coefficient of oscillation frequency (TCF) reduces from -112 ppm/K to less than 1 ppm/K.

Original languageEnglish (US)
Pages (from-to)264-268
Number of pages5
JournalSensors and Actuators, A: Physical
Volume166
Issue number2
DOIs
StatePublished - Apr 1 2011

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Keywords

  • Biosensor
  • FBAR
  • Frequency tuning
  • Quality factor
  • Temperature compensation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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