Abstract

In this paper, we present the analysis of temperature effects on a zinc oxide (ZnO)-based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments. Q up to 120, an improvement of at least 8× greater than state-of-the-art devices in liquids, is achieved by integrating a microfluidic channel with thickness comparable to the acoustic wavelength in the FBAR. However, the FBAR has a significant temperature sensitivity, which degrades Q and shifts its resonant frequency, resulting in undesirable false-positive/negative responses. To minimize the temperature sensitivity, we analyze sources of temperature effects and characterize FBAR's resonant frequency in a Pierce oscillator. The frequency shift is compensated by tuning the supply voltage of the oscillator, achieving a large tunability of -4300 ppm/V. Measurements demonstrate that Q variation is well controlled within -2.5% per centigrade for a FBAR with a channel thickness of 3.9 μm while the temperature coefficient of oscillation frequency (TCF) reduces from -112 ppm/K to less than 1 ppm/K.

Original languageEnglish (US)
Pages (from-to)264-268
Number of pages5
JournalSensors and Actuators, A: Physical
Volume166
Issue number2
DOIs
StatePublished - Apr 2011

Fingerprint

Acoustic resonators
Thermal effects
temperature effects
Q factors
resonators
acoustics
Liquids
liquids
Natural frequencies
resonant frequencies
Zinc Oxide
oscillators
Zinc oxide
Microfluidics
Temperature
Tuning
Acoustics
zinc oxides
frequency shift
temperature

Keywords

  • Biosensor
  • FBAR
  • Frequency tuning
  • Quality factor
  • Temperature compensation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Instrumentation

Cite this

Temperature effects on a high Q FBAR in liquid. / Zhang, Xu; Xu, Wencheng; Chae, Junseok.

In: Sensors and Actuators, A: Physical, Vol. 166, No. 2, 04.2011, p. 264-268.

Research output: Contribution to journalArticle

Zhang, Xu ; Xu, Wencheng ; Chae, Junseok. / Temperature effects on a high Q FBAR in liquid. In: Sensors and Actuators, A: Physical. 2011 ; Vol. 166, No. 2. pp. 264-268.
@article{3a16b0921bb646f2920c767a70061706,
title = "Temperature effects on a high Q FBAR in liquid",
abstract = "In this paper, we present the analysis of temperature effects on a zinc oxide (ZnO)-based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments. Q up to 120, an improvement of at least 8× greater than state-of-the-art devices in liquids, is achieved by integrating a microfluidic channel with thickness comparable to the acoustic wavelength in the FBAR. However, the FBAR has a significant temperature sensitivity, which degrades Q and shifts its resonant frequency, resulting in undesirable false-positive/negative responses. To minimize the temperature sensitivity, we analyze sources of temperature effects and characterize FBAR's resonant frequency in a Pierce oscillator. The frequency shift is compensated by tuning the supply voltage of the oscillator, achieving a large tunability of -4300 ppm/V. Measurements demonstrate that Q variation is well controlled within -2.5{\%} per centigrade for a FBAR with a channel thickness of 3.9 μm while the temperature coefficient of oscillation frequency (TCF) reduces from -112 ppm/K to less than 1 ppm/K.",
keywords = "Biosensor, FBAR, Frequency tuning, Quality factor, Temperature compensation",
author = "Xu Zhang and Wencheng Xu and Junseok Chae",
year = "2011",
month = "4",
doi = "10.1016/j.sna.2009.10.003",
language = "English (US)",
volume = "166",
pages = "264--268",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "2",

}

TY - JOUR

T1 - Temperature effects on a high Q FBAR in liquid

AU - Zhang, Xu

AU - Xu, Wencheng

AU - Chae, Junseok

PY - 2011/4

Y1 - 2011/4

N2 - In this paper, we present the analysis of temperature effects on a zinc oxide (ZnO)-based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments. Q up to 120, an improvement of at least 8× greater than state-of-the-art devices in liquids, is achieved by integrating a microfluidic channel with thickness comparable to the acoustic wavelength in the FBAR. However, the FBAR has a significant temperature sensitivity, which degrades Q and shifts its resonant frequency, resulting in undesirable false-positive/negative responses. To minimize the temperature sensitivity, we analyze sources of temperature effects and characterize FBAR's resonant frequency in a Pierce oscillator. The frequency shift is compensated by tuning the supply voltage of the oscillator, achieving a large tunability of -4300 ppm/V. Measurements demonstrate that Q variation is well controlled within -2.5% per centigrade for a FBAR with a channel thickness of 3.9 μm while the temperature coefficient of oscillation frequency (TCF) reduces from -112 ppm/K to less than 1 ppm/K.

AB - In this paper, we present the analysis of temperature effects on a zinc oxide (ZnO)-based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments. Q up to 120, an improvement of at least 8× greater than state-of-the-art devices in liquids, is achieved by integrating a microfluidic channel with thickness comparable to the acoustic wavelength in the FBAR. However, the FBAR has a significant temperature sensitivity, which degrades Q and shifts its resonant frequency, resulting in undesirable false-positive/negative responses. To minimize the temperature sensitivity, we analyze sources of temperature effects and characterize FBAR's resonant frequency in a Pierce oscillator. The frequency shift is compensated by tuning the supply voltage of the oscillator, achieving a large tunability of -4300 ppm/V. Measurements demonstrate that Q variation is well controlled within -2.5% per centigrade for a FBAR with a channel thickness of 3.9 μm while the temperature coefficient of oscillation frequency (TCF) reduces from -112 ppm/K to less than 1 ppm/K.

KW - Biosensor

KW - FBAR

KW - Frequency tuning

KW - Quality factor

KW - Temperature compensation

UR - http://www.scopus.com/inward/record.url?scp=79952533645&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79952533645&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2009.10.003

DO - 10.1016/j.sna.2009.10.003

M3 - Article

VL - 166

SP - 264

EP - 268

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 2

ER -