Temperature dependence of the crystalline quality of AlN layer grown on sapphire substrates by metalorganic chemical vapor deposition
Xiao Hang Li, Yong O. Wei, Shuo Wang, Hongen Xie, Tsung Ting Kao, Md Mahbub Satter, Shyh Chiang Shen, P. Douglas Yoder, Theeradetch Detchprohm, Russell D. Dupuis, Alec M. Fischer, Fernando Ponce
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