Tem specimen heating during ion beam thinning: Microstructural instability

M. J. Kim, Ray Carpenter

Research output: Contribution to journalArticlepeer-review

47 Scopus citations


Experimental results are presented to show that energy input to Au/Si interface specimens by the particle beam during "ion" thinning is sufficient to raise the specimen temperature to a somewhat surprising 370°C, and to cause microstructural instability in the form of eutectic melting and interface migration. By analysis of various possible thermal energy dissipation mechanisms it was shown that poor thermal conduction through the specimen support was responsible. The heating effects can be eliminated in the present case by the somewhat inconvenient use of a low-temperature, cooled specimen support. It is suggested that most such heating effects can be more conveniently eliminated by use of specimen supports made from high thermal conductivity materials. These measures to reduce specimen heating will become more important as particle beam thinning is increasingly applied to a wider range of less refractory materials.

Original languageEnglish (US)
Pages (from-to)327-334
Number of pages8
Issue number4
StatePublished - 1987

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

Fingerprint Dive into the research topics of 'Tem specimen heating during ion beam thinning: Microstructural instability'. Together they form a unique fingerprint.

Cite this