@inproceedings{834cff2f515d4d699abaf7dbf05e545a,
title = "TEM, MICRODIFFRACTION AND ELECTRICAL STUDIES OF BURIED SiO//2 LAYERS FORMED BY HIGH DOSE OXYGEN IMPLANTATION.",
author = "D. Fathy and Krivanek, {O. L.} and Carpenter, {R. W.} and Wilson, {S. R.}",
year = "1983",
month = dec,
day = "1",
language = "English (US)",
isbn = "0854981586",
series = "Institute of Physics Conference Series",
publisher = "Inst of Physics",
number = "67",
pages = "479--484",
booktitle = "Institute of Physics Conference Series",
edition = "67",
}