System identification and control for ASU's molecular beam epitaxy (MBE) machines

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes how experimentally derived data and standard system identification methods have been used to obtain useful continuous time models for molecular beam epitaxy (MBE) machines residing at Arizona State University (ASU). Two linear time invariant (LTI) dynamical models are presented which describe the input-output map between heater power and substrate temperature. A control law based on the simpler model is proposed. Future directions are described.

Original languageEnglish (US)
Title of host publicationProceedings of the American Control Conference
PublisherIEEE
Pages4568-4572
Number of pages5
Volume6
StatePublished - 1999
EventProceedings of the 1999 American Control Conference (99ACC) - San Diego, CA, USA
Duration: Jun 2 1999Jun 4 1999

Other

OtherProceedings of the 1999 American Control Conference (99ACC)
CitySan Diego, CA, USA
Period6/2/996/4/99

ASJC Scopus subject areas

  • Control and Systems Engineering

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