Abstract
This paper describes how experimentally derived data and standard system identification methods have been used to obtain useful continuous time models for molecular beam epitaxy (MBE) machines residing at Arizona State University (ASU). Two linear time invariant (LTI) dynamical models are presented which describe the input-output map between heater power and substrate temperature. A control law based on the simpler model is proposed. Future directions are described.
Original language | English (US) |
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Title of host publication | Proceedings of the American Control Conference |
Publisher | IEEE |
Pages | 4568-4572 |
Number of pages | 5 |
Volume | 6 |
State | Published - 1999 |
Event | Proceedings of the 1999 American Control Conference (99ACC) - San Diego, CA, USA Duration: Jun 2 1999 → Jun 4 1999 |
Other
Other | Proceedings of the 1999 American Control Conference (99ACC) |
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City | San Diego, CA, USA |
Period | 6/2/99 → 6/4/99 |
ASJC Scopus subject areas
- Control and Systems Engineering