Synthesis of heteroepitaxial BP and related Al-B-Sb-As-P films via CVD of Al(BH₄)₃and MH₃(M=P, As, Sb) at temperatures below 600 °C

Engineering & Materials Science

• Chemical vapor deposition 100%
• Epilayers 48%
• Growth temperature 46%
• Density functional theory 42%
• Buffer layers 40%
• Heterojunctions 37%
• Hydrides 36%
• Temperature 34%
• Boron 32%
• Crystalline materials 30%
• Crystals 28%
• Coatings 21%
• Gases 16%
• Hot Temperature 13%

Physics & Astronomy

• vapor deposition 65%
• synthesis 62%
• buffers 48%
• routes 47%
• doped crystals 29%
• hydrides 28%
• temperature 25%
• heterojunctions 25%
• boron 24%
• assembly 24%
• analogs 23%
• density functional theory 22%
• coatings 19%
• products 18%
• gases 14%
• interactions 11%
• energy 8%

Chemical Compounds

• Liquid Film 41%
• Buffer Solution 37%
• Chemical Vapour Deposition 25%
• Hydride 24%
• Cubic Space Group 23%
• Hexagonal Space Group 22%
• Amorphous Material 19%
• Density Functional Theory 17%
• Coating Agent 17%
• Gas 15%
• Purity 14%
• Energy 13%
• Amount 12%
• Application 9%