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Synthesis of Amorphous Si3N4-xPx Dielectrics
John Kouvetakis
(Inventor)
Arizona State University
Research output
:
Patent
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Physics & Astronomy
synthesis
100%
silicon
74%
oxynitrides
65%
semiconductor devices
56%
refractivity
38%
silicon nitrides
26%
passivity
25%
nitrides
25%
dielectric properties
23%
adjusting
22%
silicon dioxide
21%
tuning
20%
photonics
19%
lasers
12%