TY - JOUR
T1 - Synthesis and fundamental studies of (H3Ge)xSiH 4-x molecules
T2 - Precursors to semiconductor hetero- and nanostructures on Si
AU - Ritter, Cole J.
AU - Hu, Changwu
AU - Chizmeshya, Andrew
AU - Tolle, John
AU - Klewer, Douglas
AU - Tsong, Ignatius S T
AU - Kouvetakis, John
PY - 2005/7/13
Y1 - 2005/7/13
N2 - The synthesis of the entire silyl-germyl sequence of molecules (H 3Ge)xSiH4-x (x = 1-4) has been demonstrated. These include the previously unknown (H3Ge)2SiH 2, (H3Ge)3SiH, and (H3Ge) 4Si species as well as the H3GeSiH3 analogue which is obtained in practical high-purity yields as a viable alternative to disilane and digermane for semiconductor applications. The molecules are characterized by FTIR, multinuclear NMR, mass spectrometry, and Rutherford backscattering. The structural, thermochemical, and vibrational properties are studied using density functional theory. A detailed comparison of the experimental and theoretical data is used to corroborate the synthesis of specific molecular structures. The (H3Ge)xSiH 4-x family of compounds described here is not only of intrinsic molecular interest but also provides a unique route to a new class of Si-based semiconductors including epitaxial layers and coherent islands (quantum dots), with Ge-rich stoichiometries SiGe, SiGe2, SiGe3, and SiGe4 reflecting the Si/Ge content of the corresponding precursor. The layers grow directly on Si(100) at unprecedented low temperatures of 300-450 °C and display homogeneous compositional and strain profiles, low threading defect densities, and atomically planar surfaces circumventing entirely the need for conventional graded compositions or lift-off technologies. The activation energies of all Si-Ge hydride reactions on Si(100) (Ea ≈ 1.5-2.0 eV) indicate high reactivity profiles with respect to H2 desorption, consistent with the low growth temperatures of the films. The quantum dots are obtained exclusively at higher temperatures (T > 500 °C) and represent a new family of Ge-rich compositions with narrow size distribution, defect-free microstructures, and homogeneous, precisely tuned elemental content at the atomic level.
AB - The synthesis of the entire silyl-germyl sequence of molecules (H 3Ge)xSiH4-x (x = 1-4) has been demonstrated. These include the previously unknown (H3Ge)2SiH 2, (H3Ge)3SiH, and (H3Ge) 4Si species as well as the H3GeSiH3 analogue which is obtained in practical high-purity yields as a viable alternative to disilane and digermane for semiconductor applications. The molecules are characterized by FTIR, multinuclear NMR, mass spectrometry, and Rutherford backscattering. The structural, thermochemical, and vibrational properties are studied using density functional theory. A detailed comparison of the experimental and theoretical data is used to corroborate the synthesis of specific molecular structures. The (H3Ge)xSiH 4-x family of compounds described here is not only of intrinsic molecular interest but also provides a unique route to a new class of Si-based semiconductors including epitaxial layers and coherent islands (quantum dots), with Ge-rich stoichiometries SiGe, SiGe2, SiGe3, and SiGe4 reflecting the Si/Ge content of the corresponding precursor. The layers grow directly on Si(100) at unprecedented low temperatures of 300-450 °C and display homogeneous compositional and strain profiles, low threading defect densities, and atomically planar surfaces circumventing entirely the need for conventional graded compositions or lift-off technologies. The activation energies of all Si-Ge hydride reactions on Si(100) (Ea ≈ 1.5-2.0 eV) indicate high reactivity profiles with respect to H2 desorption, consistent with the low growth temperatures of the films. The quantum dots are obtained exclusively at higher temperatures (T > 500 °C) and represent a new family of Ge-rich compositions with narrow size distribution, defect-free microstructures, and homogeneous, precisely tuned elemental content at the atomic level.
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U2 - 10.1021/ja051411o
DO - 10.1021/ja051411o
M3 - Article
C2 - 15998091
AN - SCOPUS:22144442422
SN - 0002-7863
VL - 127
SP - 9855
EP - 9864
JO - Journal of the American Chemical Society
JF - Journal of the American Chemical Society
IS - 27
ER -