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Suspended Greek cross test structures for measuring the sheet resistance of non-standard cleanroom materials
S. Enderling, C. L. Brown, S. Smith, M. H. Dicks, J. T M Stevenson, A. W S Ross, M. Mitkova, Michael Kozicki, A. J. Walton
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
4
Scopus
citations