Suspended Greek cross test structures for measuring the sheet resistance of non-standard cleanroom materials

S. Enderling, C. L. Brown, S. Smith, M. H. Dicks, J. T M Stevenson, A. W S Ross, M. Mitkova, Michael Kozicki, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

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Engineering & Materials Science