Surface studies in UHV SEM and STEM

R. H. MILNE, G. G. HEMBREE, J. S. DRUCKER, C. J. HARLAND, J. A. VENABLES

Research output: Contribution to journalReview article

9 Scopus citations

Abstract

Some recent advances in surface analyses with scanning electron microscopy techniques are reviewed. It is shown that secondary electron microscopy can image monatomic steps, emergent dislocations and the early growth of thin films and oxide nuclei. The chemical composition of inhomogeneous surfaces can, in some cases, be determined with nanometre resolution with Auger signals. Overlayer coverages can occasionally be monitored with the secondary electron signal if the change of work function with coverage has been determined previously. The interpretation of these secondary and Auger signals is discussed. The combination of angular electron spectroscopy with electron microscopy is potentially a powerful technique for determining atomic positions of surface atoms and one method for obtaining the experimental data is described. Several substrate/overlayer systems are used to illustrate the amount of information that can be obtained about surface processes with scanning electron microscopy. 1993 Blackwell Science Ltd

Original languageEnglish (US)
Pages (from-to)193-199
Number of pages7
JournalJournal of Microscopy
Volume170
Issue number3
DOIs
StatePublished - Jun 1993

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Keywords

  • SEM
  • STEM
  • UHV
  • resolution
  • surfaces

ASJC Scopus subject areas

  • Pathology and Forensic Medicine
  • Histology

Cite this

MILNE, R. H., HEMBREE, G. G., DRUCKER, J. S., HARLAND, C. J., & VENABLES, J. A. (1993). Surface studies in UHV SEM and STEM. Journal of Microscopy, 170(3), 193-199. https://doi.org/10.1111/j.1365-2818.1993.tb03342.x