Surface stress effects on the thermodynamics of epitaxy

R. C. Cammarata, Karl Sieradzki

Research output: Contribution to journalArticle

Abstract

An analysis of the thermodynamics of epitaxy in thin films is presented which includes the effects of the surface stresses of the free surface and the film-substrate interface. It is shown that these effects, which are usually ignored in the theory of epitaxy, can have a major influence on both the critical thickness for epitaxy and on the partitioning of the misfit strain between the volume elastic strain and interface dislocations.

Original languageEnglish (US)
Pages (from-to)815-817
Number of pages3
JournalJournal of Electronic Materials
Volume20
Issue number7
DOIs
StatePublished - Jul 1991
Externally publishedYes

Fingerprint

Epitaxial growth
epitaxy
Thermodynamics
thermodynamics
Thin films
Substrates
thin films

Keywords

  • Surface stress
  • thermodynamics

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Electrical and Electronic Engineering

Cite this

Surface stress effects on the thermodynamics of epitaxy. / Cammarata, R. C.; Sieradzki, Karl.

In: Journal of Electronic Materials, Vol. 20, No. 7, 07.1991, p. 815-817.

Research output: Contribution to journalArticle

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