An analysis of the thermodynamics of epitaxy in thin films is presented which includes the effects of the surface stresses of the free surface and the film-substrate interface. It is shown that these effects, which are usually ignored in the theory of epitaxy, can have a major influence on both the critical thickness for epitaxy and on the partitioning of the misfit strain between the volume elastic strain and interface dislocations.
- Surface stress
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry