Abstract
An analysis of the critical thickness dependence on misfit for epitaxy is presented including effects due to surface stresses. It is shown that these surface stress effects, which have not been included in previous theories of epitaxy, can have a major influence on the critical thickness, especially for relatively large misfits. A simple model incorporating effects due to compressive surface stresses is given which, compared to previous theories, predicts significantly larger (smaller) critical thicknesses when the stress-free lattice parameter of the film is greater (less) than the lattice parameter of the substrate.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1197-1198 |
| Number of pages | 2 |
| Journal | Applied Physics Letters |
| Volume | 55 |
| Issue number | 12 |
| DOIs | |
| State | Published - 1989 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Surface stress effects on the critical film thickness for epitaxy. / Cammarata, R. C.; Sieradzki, Karl.
In: Applied Physics Letters, Vol. 55, No. 12, 1989, p. 1197-1198.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Surface stress effects on the critical film thickness for epitaxy
AU - Cammarata, R. C.
AU - Sieradzki, Karl
PY - 1989
Y1 - 1989
N2 - An analysis of the critical thickness dependence on misfit for epitaxy is presented including effects due to surface stresses. It is shown that these surface stress effects, which have not been included in previous theories of epitaxy, can have a major influence on the critical thickness, especially for relatively large misfits. A simple model incorporating effects due to compressive surface stresses is given which, compared to previous theories, predicts significantly larger (smaller) critical thicknesses when the stress-free lattice parameter of the film is greater (less) than the lattice parameter of the substrate.
AB - An analysis of the critical thickness dependence on misfit for epitaxy is presented including effects due to surface stresses. It is shown that these surface stress effects, which have not been included in previous theories of epitaxy, can have a major influence on the critical thickness, especially for relatively large misfits. A simple model incorporating effects due to compressive surface stresses is given which, compared to previous theories, predicts significantly larger (smaller) critical thicknesses when the stress-free lattice parameter of the film is greater (less) than the lattice parameter of the substrate.
UR - http://www.scopus.com/inward/record.url?scp=0004727296&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0004727296&partnerID=8YFLogxK
U2 - 10.1063/1.101654
DO - 10.1063/1.101654
M3 - Article
AN - SCOPUS:0004727296
VL - 55
SP - 1197
EP - 1198
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 12
ER -