Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range

Chuang Yuan Lee; Shih Jui Chen; Derrick Chi; Hongyu Yu; Eun Sok Kim

doi:10.1109/MEMSYS.2008.4443829

Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range

Chuang Yuan Lee, Shih Jui Chen, Derrick Chi, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

This paper reports a new simply-supported bridge structure and its use for GHz tunable capacitor application. Unlike traditional MEMS bridges with fully-clamped boundary condition (B.C.) at the anchors, the new bridge structure has simply-supported B.C. Through the implementation of a simply-supported bridge driven by two 100-μm-long ZnO-actuated cantilevers, a compact surface-micromachined tunable capacitor has been fabricated on a single chip without any warping, and shown to be capable of a 1,400% continuous tuning from 0.13 pF to 1.82 pF.

Original language	English (US)
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	1008-1011
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443829
State	Published - 2008
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: Jan 13 2008 → Jan 17 2008

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	1/13/08 → 1/17/08

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2008.4443829

Cite this

Lee, C. Y., Chen, S. J., Chi, D., Yu, H., & Kim, E. S. (2008). Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 1008-1011). Article 4443829 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443829

Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range. / Lee, Chuang Yuan; Chen, Shih Jui; Chi, Derrick et al.
MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 1008-1011 4443829 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lee, CY, Chen, SJ, Chi, D, Yu, H & Kim, ES 2008, Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443829, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1008-1011, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 1/13/08. https://doi.org/10.1109/MEMSYS.2008.4443829

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title = "Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range",

abstract = "This paper reports a new simply-supported bridge structure and its use for GHz tunable capacitor application. Unlike traditional MEMS bridges with fully-clamped boundary condition (B.C.) at the anchors, the new bridge structure has simply-supported B.C. Through the implementation of a simply-supported bridge driven by two 100-μm-long ZnO-actuated cantilevers, a compact surface-micromachined tunable capacitor has been fabricated on a single chip without any warping, and shown to be capable of a 1,400% continuous tuning from 0.13 pF to 1.82 pF.",

author = "Lee, {Chuang Yuan} and Chen, {Shih Jui} and Derrick Chi and Hongyu Yu and Kim, {Eun Sok}",

note = "Funding Information: The author(s) disclosed receipt of the following financial support for the research, authorship, and/or publication of this article: The author gratefully acknowledges doctoral funding received from the joint Economic and Social Research Council and Natural Environment Research Council interdisciplinary studentships, grant number ES/I902961/1.; 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",

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AU - Yu, Hongyu

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N1 - Funding Information: The author(s) disclosed receipt of the following financial support for the research, authorship, and/or publication of this article: The author gratefully acknowledges doctoral funding received from the joint Economic and Social Research Council and Natural Environment Research Council interdisciplinary studentships, grant number ES/I902961/1.

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N2 - This paper reports a new simply-supported bridge structure and its use for GHz tunable capacitor application. Unlike traditional MEMS bridges with fully-clamped boundary condition (B.C.) at the anchors, the new bridge structure has simply-supported B.C. Through the implementation of a simply-supported bridge driven by two 100-μm-long ZnO-actuated cantilevers, a compact surface-micromachined tunable capacitor has been fabricated on a single chip without any warping, and shown to be capable of a 1,400% continuous tuning from 0.13 pF to 1.82 pF.

AB - This paper reports a new simply-supported bridge structure and its use for GHz tunable capacitor application. Unlike traditional MEMS bridges with fully-clamped boundary condition (B.C.) at the anchors, the new bridge structure has simply-supported B.C. Through the implementation of a simply-supported bridge driven by two 100-μm-long ZnO-actuated cantilevers, a compact surface-micromachined tunable capacitor has been fabricated on a single chip without any warping, and shown to be capable of a 1,400% continuous tuning from 0.13 pF to 1.82 pF.

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Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range

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