Surface micromachined GHz tunable capacitor with 14: 1 continuous tuning range

Chuang Yuan Lee, Shih Jui Chen, Derrick Chi, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

This paper reports a new simply-supported bridge structure and its use for GHz tunable capacitor application. Unlike traditional MEMS bridges with fully-clamped boundary condition (B.C.) at the anchors, the new bridge structure has simply-supported B.C. Through the implementation of a simply-supported bridge driven by two 100-μm-long ZnO-actuated cantilevers, a compact surface-micromachined tunable capacitor has been fabricated on a single chip without any warping, and shown to be capable of a 1,400% continuous tuning from 0.13 pF to 1.82 pF.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages1008-1011
Number of pages4
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: Jan 13 2008Jan 17 2008

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period1/13/081/17/08

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Lee, C. Y., Chen, S. J., Chi, D., Yu, H., & Kim, E. S. (2008). Surface micromachined GHz tunable capacitor with 14: 1 continuous tuning range. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 1008-1011). [4443829] https://doi.org/10.1109/MEMSYS.2008.4443829