Surface micromachined, complementary-metal-oxide-semiconductor compatible tunable capacitor with 14:1 continuous tuning range

Chuang Yuan Lee, Wei Pang, Shih Jui Chen, Derrick Chi, Hongyu Yu, Eun Sok Kim

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Abstract

This letter reports a surface micromachined, complementary-metal-oxide- semiconductor compatible tunable capacitor utilizing a simply supported bridge structure, unlike traditional microelectromechanical-system bridges that use fully clamped boundary condition at the anchors. Through the implementation of a simply supported bridge driven by two 100-μm -long ZnO-actuated cantilevers, a compact tunable capacitor has been fabricated on silicon without any warping and shown to be capable of a 1400% continuous tuning from 0.13 to 1.82 pF.

Original languageEnglish (US)
Article number044103
JournalApplied Physics Letters
Volume92
Issue number4
DOIs
StatePublished - Feb 8 2008

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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