Surface energy engineering for LiTaO₃ and α-quartz SiO₂ for low temperature (<220 °c) wafer bonding

Engineering & Materials Science

• Lithium tantalate 100%
• Wafer bonding 84%
• Interfacial energy 73%
• Quartz 65%
• Epitaxial growth 23%
• Temperature 23%
• Thermal expansion 21%
• Heterojunctions 16%
• Multi-junction solar cells 6%
• Photonic devices 6%
• Acoustic surface wave devices 6%
• Lattice constants 6%
• Optical filters 6%
• Electric power measurement 5%
• Photodetectors 5%
• Surface measurement 5%
• Semiconductor lasers 5%
• Optoelectronic devices 4%
• Contact angle 4%
• Sensors 4%
• Modulators 4%
• Mach number 4%
• Pyrolysis 4%
• Semiconductor materials 3%
• Statistics 3%
• Liquids 2%
• Hot Temperature 2%
• Costs 1%

Physics & Astronomy

• surface energy 56%
• quartz 52%
• wafers 44%
• engineering 43%
• thermal expansion 32%
• coefficients 12%
• surface acoustic wave devices 9%
• sensors 9%
• optical filters 8%
• thermal decomposition 8%
• trucks 8%
• optoelectronic devices 7%
• photometers 6%
• heterojunctions 6%
• modulators 6%
• manufacturing 6%
• statistics 5%
• semiconductor lasers 5%
• costs 5%
• solar cells 5%
• photonics 5%
• liquids 3%
• performance 3%
• temperature 2%

Chemical Compounds

• Thermal Expansion 63%
• Interfacial Energy 58%
• Lattice Constant 13%
• Optoelectronics 10%
• Quartz 10%
• Solar Cell 10%
• Drop 10%
• Reflection 9%
• Semiconductor 9%
• Pyrolysis 8%
• Length 7%
• Liquid 6%
• Reaction Yield 4%
• Time 4%