Surface energy engineering for LiTaO3 and α-quartz SiO2 for low temperature (<220 °c) wafer bonding

Brian Baker, Nicole Herbots, Shawn D. Whaley, Mohammed Sahal, Jacob Kintz, Aliya Yano, Saaketh Narayan, Alex L. Brimhall, Wey Lyn Lee, Yuko Akabane, Robert J. Culbertson

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