Surface chemistry of GaAs treated with buffered HF and NH4F solutions: Slow reactions of process residuals

J. Yota, Veronica Burrows

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'Surface chemistry of GaAs treated with buffered HF and NH4F solutions: Slow reactions of process residuals'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy