Surface area enhancement of microcantilevers by femto-second laser irradiation

A. Kumar, S. Rajauria, H. Huo, O. Ozsun, Konrad Rykaczewski, J. Kumar, K. L. Ekinci

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Abstract

A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.

Original languageEnglish (US)
Article number141607
JournalApplied Physics Letters
Volume100
Issue number14
DOIs
Publication statusPublished - Apr 2 2012
Externally publishedYes

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Kumar, A., Rajauria, S., Huo, H., Ozsun, O., Rykaczewski, K., Kumar, J., & Ekinci, K. L. (2012). Surface area enhancement of microcantilevers by femto-second laser irradiation. Applied Physics Letters, 100(14), [141607]. https://doi.org/10.1063/1.3701163