Surface area enhancement of microcantilevers by femto-second laser irradiation

A. Kumar; S. Rajauria; H. Huo; O. Ozsun; K. Rykaczewski; J. Kumar; K. L. Ekinci

doi:10.1063/1.3701163

Surface area enhancement of microcantilevers by femto-second laser irradiation

A. Kumar, S. Rajauria, H. Huo, O. Ozsun, K. Rykaczewski, J. Kumar, K. L. Ekinci

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.

Original language	English (US)
Article number	141607
Journal	Applied Physics Letters
Volume	100
Issue number	14
DOIs	https://doi.org/10.1063/1.3701163
State	Published - Apr 2 2012
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.3701163

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title = "Surface area enhancement of microcantilevers by femto-second laser irradiation",

abstract = "A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.",

author = "A. Kumar and S. Rajauria and H. Huo and O. Ozsun and K. Rykaczewski and J. Kumar and Ekinci, {K. L.}",

note = "Funding Information: The authors acknowledge support from the US NSF (through Grant Nos. ECCS-0643178, CBET-0755927, CMMI-0970071, and 52100000005103). K.R. was supported by an NRC ARRA postdoctoral fellowship at NIST.",

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doi = "10.1063/1.3701163",

language = "English (US)",

volume = "100",

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T1 - Surface area enhancement of microcantilevers by femto-second laser irradiation

AU - Kumar, A.

AU - Rajauria, S.

AU - Huo, H.

AU - Ozsun, O.

AU - Rykaczewski, K.

AU - Kumar, J.

AU - Ekinci, K. L.

N1 - Funding Information: The authors acknowledge support from the US NSF (through Grant Nos. ECCS-0643178, CBET-0755927, CMMI-0970071, and 52100000005103). K.R. was supported by an NRC ARRA postdoctoral fellowship at NIST.

PY - 2012/4/2

Y1 - 2012/4/2

N2 - A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.

AB - A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 14

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ER -

Surface area enhancement of microcantilevers by femto-second laser irradiation

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