Surface area enhancement of microcantilevers by femto-second laser irradiation

A. Kumar, S. Rajauria, H. Huo, O. Ozsun, Konrad Rykaczewski, J. Kumar, K. L. Ekinci

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.

Original languageEnglish (US)
Article number141607
JournalApplied Physics Letters
Volume100
Issue number14
DOIs
StatePublished - Apr 2 2012
Externally publishedYes

Fingerprint

irradiation
augmentation
fluidics
lasers
silicon
pulses
stiffness
dissipation
estimates
energy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Kumar, A., Rajauria, S., Huo, H., Ozsun, O., Rykaczewski, K., Kumar, J., & Ekinci, K. L. (2012). Surface area enhancement of microcantilevers by femto-second laser irradiation. Applied Physics Letters, 100(14), [141607]. https://doi.org/10.1063/1.3701163

Surface area enhancement of microcantilevers by femto-second laser irradiation. / Kumar, A.; Rajauria, S.; Huo, H.; Ozsun, O.; Rykaczewski, Konrad; Kumar, J.; Ekinci, K. L.

In: Applied Physics Letters, Vol. 100, No. 14, 141607, 02.04.2012.

Research output: Contribution to journalArticle

Kumar, A, Rajauria, S, Huo, H, Ozsun, O, Rykaczewski, K, Kumar, J & Ekinci, KL 2012, 'Surface area enhancement of microcantilevers by femto-second laser irradiation', Applied Physics Letters, vol. 100, no. 14, 141607. https://doi.org/10.1063/1.3701163
Kumar, A. ; Rajauria, S. ; Huo, H. ; Ozsun, O. ; Rykaczewski, Konrad ; Kumar, J. ; Ekinci, K. L. / Surface area enhancement of microcantilevers by femto-second laser irradiation. In: Applied Physics Letters. 2012 ; Vol. 100, No. 14.
@article{cf33a26cfcce4aabb1390b2f0efad9f2,
title = "Surface area enhancement of microcantilevers by femto-second laser irradiation",
abstract = "A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.",
author = "A. Kumar and S. Rajauria and H. Huo and O. Ozsun and Konrad Rykaczewski and J. Kumar and Ekinci, {K. L.}",
year = "2012",
month = "4",
day = "2",
doi = "10.1063/1.3701163",
language = "English (US)",
volume = "100",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "14",

}

TY - JOUR

T1 - Surface area enhancement of microcantilevers by femto-second laser irradiation

AU - Kumar, A.

AU - Rajauria, S.

AU - Huo, H.

AU - Ozsun, O.

AU - Rykaczewski, Konrad

AU - Kumar, J.

AU - Ekinci, K. L.

PY - 2012/4/2

Y1 - 2012/4/2

N2 - A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.

AB - A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.

UR - http://www.scopus.com/inward/record.url?scp=84859789822&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84859789822&partnerID=8YFLogxK

U2 - 10.1063/1.3701163

DO - 10.1063/1.3701163

M3 - Article

VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 14

M1 - 141607

ER -