Surface and interface morphology of small islands of TiSi2 and ZrSi2 on (001) silicon

B. L. Kropman, C. A. Sukow, R. J. Nemanich

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

The morphology of small islands of TiSi2 and ZrSi2 on Si(100) is investigated and compared to larger islands in terms of a solid state capillarity model. The silicide islands are formed by deposition of very thin layers of titanium and zirconium (3-50 Angstrom) followed by an anneal at high temperatures (700-1200°C). SEM and cross-sectional HRTEM are used to study respectively the surface and interface morphology. It is found that the C49-phase for TiSi2 is stable for layers as thin as 8 Angstrom, and annealing temperatures as high as 1200°C. An explanation for the fact that the formed islands align parallel to the Si directions is given in terms of interplanar lattice spacings.

Original languageEnglish (US)
Title of host publicationEvolution of Surface and Thin Film Microstructure
EditorsHarry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally
PublisherPubl by Materials Research Society
Pages589-592
Number of pages4
ISBN (Print)1558991751
StatePublished - Dec 1 1993
Externally publishedYes
EventProceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: Nov 30 1992Dec 4 1992

Publication series

NameMaterials Research Society Symposium Proceedings
Volume280
ISSN (Print)0272-9172

Other

OtherProceedings of the 1992 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period11/30/9212/4/92

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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    Kropman, B. L., Sukow, C. A., & Nemanich, R. J. (1993). Surface and interface morphology of small islands of TiSi2 and ZrSi2 on (001) silicon. In H. A. Atwater, E. Chason, M. H. Grabow, & M. G. Lagally (Eds.), Evolution of Surface and Thin Film Microstructure (pp. 589-592). (Materials Research Society Symposium Proceedings; Vol. 280). Publ by Materials Research Society.