Suppression of Insulator Charging During Secondary‐Ion Mass Spectroscopy and Scanning Electron Microscopy

Emilio Giraldez, Leonard Dolhert, W. David Kingery, William Petuskey

Research output: Contribution to journalArticle

Abstract

Work with a hot stage capable of temperatures of up to 1200°C has shown that charging of insulating materials in a scanning electron microscope can be completely eliminated by heating the sample to several hundred degrees centigrade. A similar scheme was devised to eliminate charging in a secondary‐ion mass spectrometer in order to study oxygen‐18 concentration profiles in MgO. Before and during analysis the sample surface was exposed to a high‐energy electron beam. The mechanism responsible for the elimination of spurious charging is related to surface heating by the electron beam.

Original languageEnglish (US)
Pages (from-to)C‐286-C‐287
JournalJournal of the American Ceramic Society
Volume68
Issue number10
DOIs
StatePublished - Oct 1985

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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