@inproceedings{dfe8f1d36e50441aaf4a651635710b0d,
title = "Substrate dependent growth of microcrystalline silicon",
abstract = "Silicon (Si) heterojunction solar cells with efficiencies approaching 24.7% are poised to replace Si diffused junction solar cells. To further improve their efficiency, microcrystalline Si (μc-Si) could replace the amorphous Si (a-Si) emitter layer, thus improving the effective doping and increasing transparency. This improvement in efficiency would come at little additional cost and could be accomplished by altering the plasma-enhanced chemical vapor deposition (PECVD) conditions. A μc-Si film was deposited on glass, a-Si, c-Si, silicon dioxide, and sapphire. When integrated over the AM 1.5G spectrum, the a-Si:H film absorbs 3 mA/cm2 the 50% crystalline μc-Si:H film absorbs 1.7 mA/cm2.",
keywords = "amorphous materials, heterojunction, microcrystals, photovoltaic cells, silicon, substrates",
author = "Mark Bailly and Carpenter, {Joe V.} and Zachary Holman and Stuart Bowden",
year = "2014",
month = oct,
day = "15",
doi = "10.1109/PVSC.2014.6925130",
language = "English (US)",
series = "2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1201--1205",
booktitle = "2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014",
note = "40th IEEE Photovoltaic Specialist Conference, PVSC 2014 ; Conference date: 08-06-2014 Through 13-06-2014",
}