Sub-300 Å (Bax,Sr1-x)TiO3 films by metal organic chemical vapor deposition: Nanostructure, step coverage, and dielectric properties

Sandwip Dey; Prashant Majhi; Yong W. Shin; Derek Tang; Aaron Kirby; Jun Zhao; Charles Dornfest; Lee Lou; Shreyas Kher

doi:10.1143/jjap.40.3354

Sub-300 Å (Ba_x,Sr_1-x)TiO₃ films by metal organic chemical vapor deposition: Nanostructure, step coverage, and dielectric properties

Sandwip Dey, Prashant Majhi, Yong W. Shin, Derek Tang, Aaron Kirby, Jun Zhao, Charles Dornfest, Lee Lou, Shreyas Kher

Chemical Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

This is a preliminary report on the nanostructure and its evolution, step-coverage, and dielectric properties of sub-300 Å (Ba_x, Sr_1-x)TiO₃ films. The (001)-oriented polycrystalline films were deposited at 50-70 Åmin by metal-organic chemical vapor deposition (MOCVD) on (111) Pt-passivated Si substrates of 8-inch diameter. From the detailed nonstructural characterization of (Ba_0.64, Sr_0.36)TiO₃ films, the orientation, cation stoichiometry, and an alternative but plausible mechanism of growth and the origin of roughness are forwarded. Additionally, the step-coverage in 2 : 1 to 5 : 1 aspect-ratio trenches, coupled with the frequency/voltage dependence of the dielectric properties of (Ba_x, Sr_1-x)TiO₃ films are reported. A 275 Å (Ba_0.64, Sr_0.36)TiO₃ film exhibited a dispersionless dielectric permittivity and loss tangent of 260 and 0.003, respectively, and the permittivity (ε_r = 340) of a 300 Å (Ba_0.5, Sr_0.5)TiO₃ film reduced by 53% at a dc-bias of 3 V.

Original language	English (US)
Pages (from-to)	3354-3358
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	40
Issue number	5 A
DOIs	https://doi.org/10.1143/jjap.40.3354
State	Published - May 2001

Keywords

BST
HRTEM
MOCVD
Nanostructure evolution
Roughness

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/jjap.40.3354

Cite this

Dey, S., Majhi, P., Shin, Y. W., Tang, D., Kirby, A., Zhao, J., Dornfest, C., Lou, L., & Kher, S. (2001). Sub-300 Å (Ba_x,Sr_1-x)TiO₃ films by metal organic chemical vapor deposition: Nanostructure, step coverage, and dielectric properties. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 40(5 A), 3354-3358. https://doi.org/10.1143/jjap.40.3354

Sub-300 Å (Ba_x,Sr_1-x)TiO₃ films by metal organic chemical vapor deposition : Nanostructure, step coverage, and dielectric properties. / Dey, Sandwip; Majhi, Prashant; Shin, Yong W. et al.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 40, No. 5 A, 05.2001, p. 3354-3358.

Research output: Contribution to journal › Article › peer-review

Dey, S, Majhi, P, Shin, YW, Tang, D, Kirby, A, Zhao, J, Dornfest, C, Lou, L & Kher, S 2001, 'Sub-300 Å (Ba_x,Sr_1-x)TiO₃ films by metal organic chemical vapor deposition: Nanostructure, step coverage, and dielectric properties', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 40, no. 5 A, pp. 3354-3358. https://doi.org/10.1143/jjap.40.3354

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abstract = "This is a preliminary report on the nanostructure and its evolution, step-coverage, and dielectric properties of sub-300 {\AA} (Bax, Sr1-x)TiO3 films. The (001)-oriented polycrystalline films were deposited at 50-70 {\AA}min by metal-organic chemical vapor deposition (MOCVD) on (111) Pt-passivated Si substrates of 8-inch diameter. From the detailed nonstructural characterization of (Ba0.64, Sr0.36)TiO3 films, the orientation, cation stoichiometry, and an alternative but plausible mechanism of growth and the origin of roughness are forwarded. Additionally, the step-coverage in 2 : 1 to 5 : 1 aspect-ratio trenches, coupled with the frequency/voltage dependence of the dielectric properties of (Bax, Sr1-x)TiO3 films are reported. A 275 {\AA} (Ba0.64, Sr0.36)TiO3 film exhibited a dispersionless dielectric permittivity and loss tangent of 260 and 0.003, respectively, and the permittivity (εr = 340) of a 300 {\AA} (Ba0.5, Sr0.5)TiO3 film reduced by 53% at a dc-bias of 3 V.",

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