Abstract
Atomic-resolution imaging in the scanning transmission electron microscope (STEM) constitutes a powerful tool for nanostructure characterization. Here, we demonstrate the quantitative interpretation of atomic-resolution high-angle annular dark-field (ADF) STEM images using an approach that does not rely on adjustable parameters. We measure independently the instrumental parameters that affect sub-0.1 nm-resolution ADF images, quantify their individual and collective contributions to the image intensity, and show that knowledge of these parameters enables a quantitative interpretation of the absolute intensity and contrast across all accessible spatial frequencies. The analysis also provides a method for the in-situ measurement of the STEM's effective source distribution.
Original language | English (US) |
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Article number | 191915 |
Journal | Applied Physics Letters |
Volume | 100 |
Issue number | 19 |
DOIs | |
State | Published - May 7 2012 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)