Sub-0.1 nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters

C. Dwyer, C. Maunders, C. L. Zheng, M. Weyland, P. C. Tiemeijer, J. Etheridge

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Abstract

Atomic-resolution imaging in the scanning transmission electron microscope (STEM) constitutes a powerful tool for nanostructure characterization. Here, we demonstrate the quantitative interpretation of atomic-resolution high-angle annular dark-field (ADF) STEM images using an approach that does not rely on adjustable parameters. We measure independently the instrumental parameters that affect sub-0.1 nm-resolution ADF images, quantify their individual and collective contributions to the image intensity, and show that knowledge of these parameters enables a quantitative interpretation of the absolute intensity and contrast across all accessible spatial frequencies. The analysis also provides a method for the in-situ measurement of the STEM's effective source distribution.

Original languageEnglish (US)
Article number191915
JournalApplied Physics Letters
Volume100
Issue number19
DOIs
StatePublished - May 7 2012
Externally publishedYes

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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