Sub-0.1 nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters

Christian Dwyer, C. Maunders, C. L. Zheng, M. Weyland, P. C. Tiemeijer, J. Etheridge

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

Atomic-resolution imaging in the scanning transmission electron microscope (STEM) constitutes a powerful tool for nanostructure characterization. Here, we demonstrate the quantitative interpretation of atomic-resolution high-angle annular dark-field (ADF) STEM images using an approach that does not rely on adjustable parameters. We measure independently the instrumental parameters that affect sub-0.1 nm-resolution ADF images, quantify their individual and collective contributions to the image intensity, and show that knowledge of these parameters enables a quantitative interpretation of the absolute intensity and contrast across all accessible spatial frequencies. The analysis also provides a method for the in-situ measurement of the STEM's effective source distribution.

Original languageEnglish (US)
Article number191915
JournalApplied Physics Letters
Volume100
Issue number19
DOIs
StatePublished - May 7 2012
Externally publishedYes

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transmission electron microscopy
scanning electron microscopy
electron microscopes
scanning
in situ measurement
high resolution

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Sub-0.1 nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters. / Dwyer, Christian; Maunders, C.; Zheng, C. L.; Weyland, M.; Tiemeijer, P. C.; Etheridge, J.

In: Applied Physics Letters, Vol. 100, No. 19, 191915, 07.05.2012.

Research output: Contribution to journalArticle

Dwyer, Christian ; Maunders, C. ; Zheng, C. L. ; Weyland, M. ; Tiemeijer, P. C. ; Etheridge, J. / Sub-0.1 nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters. In: Applied Physics Letters. 2012 ; Vol. 100, No. 19.
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