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Study of dopant activation in biaxially compressively strained SiGe layers using excimer laser annealing
G. V. Luong, S. Wirths, S. Stefanov, B. Holländer, J. Schubert, J. C. Conde, T. Stoica, U. Breuer, S. Chiussi, Michael Goryll, D. Buca, S. Mantl
Research output: Contribution to journal › Article › peer-review
22
Scopus
citations