@inproceedings{ff9b5eecee14403aa71de01205e0cf82,
title = "Study of a novel ITO/AZO/SiO2/p-Si SIS heterojunction",
abstract = "ITO/AZO double films were deposited by RF sputtering on p-Si(100) substrate to fabricate ITO/AZO/SiO2/p-Si SIS heterojunction. The structural, optics and electrical properties of the ITO/AZO films were characterized by UV-VIS spectrophotometer, four point probe and Hall effect measurement, respectively. The results show that ITO/AZO films have good quality. The electrical junction properties were investigated by I-V measurement, which reveals that the heterojunction shows typical good rectifying behavior and great photoelectric effect.",
keywords = "Al-doped ZnO (AZO), Current-voltage(I-V) characteristics, ITO, SIS heterojunction, Sputtering",
author = "Bo He and Zhong, {Quan Ma} and Jing Xu and Lei Zhao and Feng Li and Cheng Shen and Zhang, {Nan Sheng} and Yu, {Zheng Shan} and Yin, {Yan Ting}",
year = "2009",
doi = "10.1109/SOPO.2009.5230104",
language = "English (US)",
isbn = "9781424444113",
series = "2009 Symposium on Photonics and Optoelectronics, SOPO 2009",
booktitle = "2009 Symposium on Photonics and Optoelectronics, SOPO 2009",
note = "2009 Symposium on Photonics and Optoelectronics, SOPO 2009 ; Conference date: 14-08-2009 Through 16-08-2009",
}