Studies of the coupling of final d*-states in mixed Hf and Ti oxides (HfO2)x(TiOx)1-x and other complex oxides

C. C. Fulton; G. Lucovsky; Y. Zhang; Y. Zou; R. J. Nemanich; H. Ade; J. L. Whitten

doi:10.1016/j.elspec.2005.01.098

Studies of the coupling of final d*-states in mixed Hf and Ti oxides (HfO₂)_x(TiO_x)_1-x and other complex oxides

C. C. Fulton, G. Lucovsky, Y. Zhang, Y. Zou, R. J. Nemanich, H. Ade, J. L. Whitten

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

X-ray absorption spectroscopy and vacuum ultra-violet spectroscopic ellipsometry are used to study the electronic structure of complex oxides comprised of mixed TM/TM and TM/RE oxides. Experimental spectra for HfTiO ₄ and Gd(Dy)ScO₃ indicate multiple d-state features in the O K₁ edge. These are compared with the empirical models for atomic d-state mixing. It is concluded that a mean field, virtual alloy model does not apply, and that the effects associated with the differences in atomic coordination and deviations from ideal octahedral or cubic bonding play a determinant role in d-state atom mixing. The results are applied band edge engineering options for high-k dielectric applications.

Original language	English (US)
Pages (from-to)	913-916
Number of pages	4
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	144-147
DOIs	https://doi.org/10.1016/j.elspec.2005.01.098
State	Published - Jun 2005
Externally published	Yes

Keywords

Band gap engineering
Complex oxides
Spectroscopic ellipsometry
X-ray absorption spectra
d-State coupling

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

Access to Document

10.1016/j.elspec.2005.01.098

Cite this

@article{075b36f9a0524f81babc253bc9c2cfc3,

title = "Studies of the coupling of final d*-states in mixed Hf and Ti oxides (HfO2)x(TiOx)1-x and other complex oxides",

abstract = "X-ray absorption spectroscopy and vacuum ultra-violet spectroscopic ellipsometry are used to study the electronic structure of complex oxides comprised of mixed TM/TM and TM/RE oxides. Experimental spectra for HfTiO 4 and Gd(Dy)ScO3 indicate multiple d-state features in the O K1 edge. These are compared with the empirical models for atomic d-state mixing. It is concluded that a mean field, virtual alloy model does not apply, and that the effects associated with the differences in atomic coordination and deviations from ideal octahedral or cubic bonding play a determinant role in d-state atom mixing. The results are applied band edge engineering options for high-k dielectric applications.",

keywords = "Band gap engineering, Complex oxides, Spectroscopic ellipsometry, X-ray absorption spectra, d-State coupling",

author = "Fulton, {C. C.} and G. Lucovsky and Y. Zhang and Y. Zou and Nemanich, {R. J.} and H. Ade and Whitten, {J. L.}",

note = "Funding Information: This research has been supported by ONR, SRC and the SRC/ISMT Front End Processing Center.",

year = "2005",

month = jun,

doi = "10.1016/j.elspec.2005.01.098",

language = "English (US)",

volume = "144-147",

pages = "913--916",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

issn = "0368-2048",

publisher = "Elsevier",

}

TY - JOUR

T1 - Studies of the coupling of final d*-states in mixed Hf and Ti oxides (HfO2)x(TiOx)1-x and other complex oxides

AU - Fulton, C. C.

AU - Lucovsky, G.

AU - Zhang, Y.

AU - Zou, Y.

AU - Nemanich, R. J.

AU - Ade, H.

AU - Whitten, J. L.

N1 - Funding Information: This research has been supported by ONR, SRC and the SRC/ISMT Front End Processing Center.

PY - 2005/6

Y1 - 2005/6

N2 - X-ray absorption spectroscopy and vacuum ultra-violet spectroscopic ellipsometry are used to study the electronic structure of complex oxides comprised of mixed TM/TM and TM/RE oxides. Experimental spectra for HfTiO 4 and Gd(Dy)ScO3 indicate multiple d-state features in the O K1 edge. These are compared with the empirical models for atomic d-state mixing. It is concluded that a mean field, virtual alloy model does not apply, and that the effects associated with the differences in atomic coordination and deviations from ideal octahedral or cubic bonding play a determinant role in d-state atom mixing. The results are applied band edge engineering options for high-k dielectric applications.

AB - X-ray absorption spectroscopy and vacuum ultra-violet spectroscopic ellipsometry are used to study the electronic structure of complex oxides comprised of mixed TM/TM and TM/RE oxides. Experimental spectra for HfTiO 4 and Gd(Dy)ScO3 indicate multiple d-state features in the O K1 edge. These are compared with the empirical models for atomic d-state mixing. It is concluded that a mean field, virtual alloy model does not apply, and that the effects associated with the differences in atomic coordination and deviations from ideal octahedral or cubic bonding play a determinant role in d-state atom mixing. The results are applied band edge engineering options for high-k dielectric applications.

KW - Band gap engineering

KW - Complex oxides

KW - Spectroscopic ellipsometry

KW - X-ray absorption spectra

KW - d-State coupling

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U2 - 10.1016/j.elspec.2005.01.098

DO - 10.1016/j.elspec.2005.01.098

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SN - 0368-2048

VL - 144-147

SP - 913

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JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

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