Studies of Diffused Boron Emitters: Saturation Current, Bandgap Narrowing, and Surface Recombination Velocity

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Abstract

The emitter saturation current density J0 was measured on diffused boron emitters in silicon for the case in which the emitter surface is passivated by a thermal oxide and for the case in which Al/Si is deposited on the emitter surface. The oxide-passivated emitters have a surface recombination velocity s which is near its lowest technologically achievable value. In contrast, the emitters with Al/Si on the surface have surface recombination velocities which approach the maximum possible value of s. From the J0 measurements, the apparent bandgap narrowing as a function of boron doping was found. Using this bandgap narrowing data, the surface recombination velocity at the Si/SiO2 interface was extracted for surface boron concentrations from 3 × 1017 to 3 × 1019 cm-3.

Original languageEnglish (US)
Pages (from-to)1399-1409
Number of pages11
JournalIEEE Transactions on Electron Devices
Volume38
Issue number6
DOIs
StatePublished - Jun 1991
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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