STRUCTURE OF THERMALLY-INDUCED MICRODEFECTS IN CZ SILICON.

Fernando Ponce, T. Yamashita, S. Hahn

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Proceedings - The Electrochemical Society
Editors	W.Murray Bullis, L.C. Kimerling
Place of Publication	Pennington, NJ, USA
Publisher	Electrochemical Soc Inc
Pages	105-114
Number of pages	10
Volume	83-9
State	Published - 1983
Externally published	Yes

ASJC Scopus subject areas

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title = "STRUCTURE OF THERMALLY-INDUCED MICRODEFECTS IN CZ SILICON.",

author = "Fernando Ponce and T. Yamashita and S. Hahn",

year = "1983",

language = "English (US)",

volume = "83-9",

pages = "105--114",

editor = "W.Murray Bullis and L.C. Kimerling",

booktitle = "Proceedings - The Electrochemical Society",

publisher = "Electrochemical Soc Inc",

}

TY - GEN

T1 - STRUCTURE OF THERMALLY-INDUCED MICRODEFECTS IN CZ SILICON.

AU - Ponce, Fernando

AU - Yamashita, T.

AU - Hahn, S.

PY - 1983

Y1 - 1983

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M3 - Conference contribution

AN - SCOPUS:0020940790

VL - 83-9

SP - 105

EP - 114

BT - Proceedings - The Electrochemical Society

A2 - Bullis, W.Murray

A2 - Kimerling, L.C.

PB - Electrochemical Soc Inc

CY - Pennington, NJ, USA

ER -