STRUCTURE OF THERMALLY-INDUCED MICRODEFECTS IN CZ SILICON.

Fernando Ponce, T. Yamashita, S. Hahn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations
Original languageEnglish (US)
Title of host publicationProceedings - The Electrochemical Society
EditorsW.Murray Bullis, L.C. Kimerling
Place of PublicationPennington, NJ, USA
PublisherElectrochemical Soc Inc
Pages105-114
Number of pages10
Volume83-9
StatePublished - 1983
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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