STRUCTURE OF OXYGEN-IMPLANTED (111) SILICON BEFORE AND AFTER HEAT-PULSE ANNEALING.

Z. Liliental-Weber, Ray Carpenter, J. C. Kelly

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Fingerprint

Dive into the research topics of 'STRUCTURE OF OXYGEN-IMPLANTED (111) SILICON BEFORE AND AFTER HEAT-PULSE ANNEALING.'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds