STRUCTURE OF MICRODEFECTS IN SEMICONDUCTING MATERIALS.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Microdefects are common in semiconducting materials of the highest quality. Some are present in as-grown materials, others appear during subsequent processing, especially when subjected to thermal treatments. Their identification has not been possible until very recently because their size is relatively too small to be observed by conventional electron microscopy. A review of recent applications of HREM to the study of microdefects in silicon and GaAs is presented in this paper.

Original languageEnglish (US)
Title of host publicationInstitute of Physics Conference Series
Pages1-10
Number of pages10
Edition76
StatePublished - Dec 1 1985
Externally publishedYes

Publication series

NameInstitute of Physics Conference Series
Number76
ISSN (Print)0373-0751

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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