Structure and orientation of epitaxial titanium silicide nanowires determined by electron microdiffraction

M. Stevens, Zhian He, David Smith, Peter Bennett

Research output: Contribution to journalArticle

38 Scopus citations

Abstract

Transmission electron microdiffraction was used to determine the crystal structure and epitaxial orientation of self-assembled titanium silicide nanowires (NW). The NWs were formed by deposition of ∼1 monolayer Ti on Si (111) at ∼850°C. It was shown that most of the NWs are incommensurate and fully strain relaxed and they generally extend below the surface with inclined incoherent interfaces.

Original languageEnglish (US)
Pages (from-to)5670-5674
Number of pages5
JournalJournal of Applied Physics
Volume93
Issue number9
DOIs
StatePublished - May 1 2003

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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