Structure and orientation of epitaxial titanium silicide nanowires determined by electron microdiffraction

M. Stevens; Zhian He; David Smith; Peter Bennett

doi:10.1063/1.1565173

Structure and orientation of epitaxial titanium silicide nanowires determined by electron microdiffraction

M. Stevens, Zhian He, David Smith, Peter Bennett

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Abstract

Transmission electron microdiffraction was used to determine the crystal structure and epitaxial orientation of self-assembled titanium silicide nanowires (NW). The NWs were formed by deposition of ∼1 monolayer Ti on Si (111) at ∼850°C. It was shown that most of the NWs are incommensurate and fully strain relaxed and they generally extend below the surface with inclined incoherent interfaces.

Original language	English (US)
Pages (from-to)	5670-5674
Number of pages	5
Journal	Journal of Applied Physics
Volume	93
Issue number	9
DOIs	https://doi.org/10.1063/1.1565173
State	Published - May 1 2003

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.1565173

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title = "Structure and orientation of epitaxial titanium silicide nanowires determined by electron microdiffraction",

abstract = "Transmission electron microdiffraction was used to determine the crystal structure and epitaxial orientation of self-assembled titanium silicide nanowires (NW). The NWs were formed by deposition of ∼1 monolayer Ti on Si (111) at ∼850°C. It was shown that most of the NWs are incommensurate and fully strain relaxed and they generally extend below the surface with inclined incoherent interfaces.",

author = "M. Stevens and Zhian He and David Smith and Peter Bennett",

year = "2003",

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doi = "10.1063/1.1565173",

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T1 - Structure and orientation of epitaxial titanium silicide nanowires determined by electron microdiffraction

AU - Stevens, M.

AU - He, Zhian

AU - Smith, David

AU - Bennett, Peter

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Y1 - 2003/5/1

N2 - Transmission electron microdiffraction was used to determine the crystal structure and epitaxial orientation of self-assembled titanium silicide nanowires (NW). The NWs were formed by deposition of ∼1 monolayer Ti on Si (111) at ∼850°C. It was shown that most of the NWs are incommensurate and fully strain relaxed and they generally extend below the surface with inclined incoherent interfaces.

AB - Transmission electron microdiffraction was used to determine the crystal structure and epitaxial orientation of self-assembled titanium silicide nanowires (NW). The NWs were formed by deposition of ∼1 monolayer Ti on Si (111) at ∼850°C. It was shown that most of the NWs are incommensurate and fully strain relaxed and they generally extend below the surface with inclined incoherent interfaces.

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Structure and orientation of epitaxial titanium silicide nanowires determined by electron microdiffraction

Abstract

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