Structural, microstructural, and electrical properties of gold films and Schottky contacts on remote plasma-cleaned, n -type ZnO{0001} surfaces

B. J. Coppa, C. C. Fulton, S. M. Kiesel, R. F. Davis, C. Pandarinath, J. E. Burnette, Robert Nemanich, David Smith

Research output: Contribution to journalArticle

107 Citations (Scopus)

Abstract

The structural and electrical properties of Schottky contacts and gold films on remote plasma-cleaned, n-type ZnO{0001} surfaces are discussed. Current-voltage measurements of Au contacts deposited on cleaned, n-type ZnO(0001) surfaces showed reverse bias leakage current densities of ∼0.01 A/cm 2 at 4.6 V reverse bias and ideality factors > 2. The similarly deposited Au Schottky contacts initially grew through the same mechanisms. The Plasma cleaning and cooling both surface in vacuum eliminated all detectable hydrocarbon contaminant, reduced the amount of the hydroxide layer to ∼0.4 ML, and resulted in a 0.7-eV reduction in downward band bending and 0.7 eV lowering of the surface Fermi level.

Original languageEnglish (US)
Article number103517
JournalJournal of Applied Physics
Volume97
Issue number10
DOIs
StatePublished - May 15 2005

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electric contacts
electrical properties
gold
surface cooling
electrical measurement
cleaning
hydroxides
Fermi surfaces
contaminants
leakage
hydrocarbons
current density
vacuum

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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Structural, microstructural, and electrical properties of gold films and Schottky contacts on remote plasma-cleaned, n -type ZnO{0001} surfaces. / Coppa, B. J.; Fulton, C. C.; Kiesel, S. M.; Davis, R. F.; Pandarinath, C.; Burnette, J. E.; Nemanich, Robert; Smith, David.

In: Journal of Applied Physics, Vol. 97, No. 10, 103517, 15.05.2005.

Research output: Contribution to journalArticle

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