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STRUCTURAL CHANGES DURING TRANSIENT POST-ANNEALING OF PREANNEALED AND ARSENIC IMPLANTED POLYCRYSTALLINE SILICON FILMS.
Stephen Krause, S. R. Wilson, R. B. Gregory, W. M. Paulson, J. A. Leavitt, L. C. McIntyre, J. L. Seerveld, P. Stoss
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2
Scopus
citations