STRUCTURAL AND CHEMICAL MICROANALYSIS OF OXYGEN-BEARING PRECIPITATES IN SILICON.

R. W. Carpenter, I. Chan, H. L. Tsai, C. Varker, L. J. Demer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
Pages195-199
Number of pages5
StatePublished - Jan 1 1983

Publication series

NameMaterials Research Society Symposia Proceedings
Volume14
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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