STRUCTURAL AND CHEMICAL MICROANALYSIS OF OXYGEN-BEARING PRECIPITATES IN SILICON.

R. W. Carpenter, I. Chan, H. L. Tsai, C. Varker, L. J. Demer

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Materials Research Society Symposia Proceedings
Pages	195-199
Number of pages	5
State	Published - 1983
Externally published	Yes

Name	Materials Research Society Symposia Proceedings
Volume	14
ISSN (Print)	0272-9172

ASJC Scopus subject areas

@inproceedings{60855fc57a4346059e21900920941a25,

title = "STRUCTURAL AND CHEMICAL MICROANALYSIS OF OXYGEN-BEARING PRECIPITATES IN SILICON.",

author = "Carpenter, {R. W.} and I. Chan and Tsai, {H. L.} and C. Varker and Demer, {L. J.}",

year = "1983",

language = "English (US)",

isbn = "0444008128",

series = "Materials Research Society Symposia Proceedings",

pages = "195--199",

booktitle = "Materials Research Society Symposia Proceedings",

}

TY - GEN

T1 - STRUCTURAL AND CHEMICAL MICROANALYSIS OF OXYGEN-BEARING PRECIPITATES IN SILICON.

AU - Carpenter, R. W.

AU - Chan, I.

AU - Tsai, H. L.

AU - Varker, C.

AU - Demer, L. J.

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=0020547143&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020547143&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0020547143

SN - 0444008128

T3 - Materials Research Society Symposia Proceedings

SP - 195

EP - 199

BT - Materials Research Society Symposia Proceedings

ER -