STRUCTURAL ANALYSIS OF SOLIDS FOR MATERIALS DESIGN: HIGH RESOLUTION ANALYTICAL MICROSCOPY.

For materials science research the most important capabilities of high resolution analytical electron microscopy are microspectroscopy and microdiffraction. These methods are briefly discussed from the experimental viewpoint, particularly the effects of specimen thickness and probe configuration on experiments. Applications of these experimental methods to determination of very fine microstructures in CZ-silicon containing oxide precipitates, nitrogen ion implanted silicon, aluminum alloy-silicon carbide whisker reinforced composites and sintered silicon carbide are examined and discussed. In all but the composite amorphous phases are important. For amorphous phases, in particular, microspectroscopy is essential for characterization. Spatial resolution of approximately 5nm was sufficient for most phase identification in these material systems, however, investigation of interface reaction mechanisms requires spatial resolution of approximately 0. 5nm.