Stresses in multilayered thin films

Robert C. Cammarata, John C. Bilello, A. Lindsay Greer, Karl Sieradzki, Steven M. Yalisove

Research output: Contribution to journalArticle

27 Scopus citations
Original languageEnglish (US)
Pages (from-to)34-38
Number of pages5
JournalMRS Bulletin
Volume24
Issue number2
Publication statusPublished - Feb 1999

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ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Cammarata, R. C., Bilello, J. C., Greer, A. L., Sieradzki, K., & Yalisove, S. M. (1999). Stresses in multilayered thin films. MRS Bulletin, 24(2), 34-38.