Stresses in multilayered thin films

Robert C. Cammarata; John C. Bilello; A. Lindsay Greer; Karl Sieradzki; Steven M. Yalisove

doi:10.1557/S0883769400051526

Stresses in multilayered thin films

Robert C. Cammarata, John C. Bilello, A. Lindsay Greer, Karl Sieradzki, Steven M. Yalisove

Mechanical and Aerospace Engineering

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

Original language	English (US)
Pages (from-to)	34-38
Number of pages	5
Journal	MRS Bulletin
Volume	24
Issue number	2
DOIs	https://doi.org/10.1557/S0883769400051526
State	Published - Feb 1999

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Physical and Theoretical Chemistry

Access to Document

10.1557/S0883769400051526

Cite this

@article{2d9950204af54461b8e1edbb8515b71d,

title = "Stresses in multilayered thin films",

author = "Cammarata, {Robert C.} and Bilello, {John C.} and Greer, {A. Lindsay} and Karl Sieradzki and Yalisove, {Steven M.}",

year = "1999",

month = feb,

doi = "10.1557/S0883769400051526",

language = "English (US)",

volume = "24",

pages = "34--38",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Materials Research Society",

number = "2",

}

TY - JOUR

T1 - Stresses in multilayered thin films

AU - Cammarata, Robert C.

AU - Bilello, John C.

AU - Greer, A. Lindsay

AU - Sieradzki, Karl

AU - Yalisove, Steven M.

PY - 1999/2

Y1 - 1999/2

UR - http://www.scopus.com/inward/record.url?scp=0033076435&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033076435&partnerID=8YFLogxK

U2 - 10.1557/S0883769400051526

DO - 10.1557/S0883769400051526

M3 - Article

AN - SCOPUS:0033076435

SN - 0883-7694

VL - 24

SP - 34

EP - 38

JO - MRS Bulletin

JF - MRS Bulletin

IS - 2

ER -

Stresses in multilayered thin films

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this