Strain measurements of SiGeC heteroepitaxial layers on Si(100) using ion beam analysis

S. Sego, Robert Culbertson, P. Ye, S. Hearne, J. Xiang, N. Herbots, Z. Atzmon, A. E. Bair

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Engineering & Materials Science

Chemical Compounds