Staffing analysis tool for operator-machine-lot interference in semiconductor manufacturing

Doron Meyersdorf, Ori Biron, Ertunga C. Ozelkan, John Fowler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper describes the concepts underlying a new staffing tool, which evaluates staffing requirements, plan future shift sizes, perform sensitivity analysis, and locate and measure improvement opportunities in terms of worker operations. The model is based on M/M/S/K queuing theory to analyze the operator-machine-lot (OML) interference especially in semiconductor manufacturing processes. Unlike classical approaches, in which the machines are treated as customers, here wafer lots are taken as the designated customers to be serviced. A comparison of a simulation, OML, and a traditional M/M/S/K model (where the machines are modeled as customers) shows that OML model yields much closer results to the simulation than the traditional M/M/S/K model. Furthermore, from the computational point of view OML is more efficient than the simulation model which can be very time consuming especially in the complex semiconductor manufacturing environment. Thus, OML model is a superior alternative to the classical interference modeling and facilitates staffing recommendations that improve overall equipment effectiveness (OEE) and therefore productivity.

Original languageEnglish (US)
Title of host publicationIEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages335-340
Number of pages6
StatePublished - 1997
Externally publishedYes
EventProceedings of the 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Cambridge, MA, USA
Duration: Sep 10 1997Sep 12 1997

Other

OtherProceedings of the 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
CityCambridge, MA, USA
Period9/10/979/12/97

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Meyersdorf, D., Biron, O., Ozelkan, E. C., & Fowler, J. (1997). Staffing analysis tool for operator-machine-lot interference in semiconductor manufacturing. In IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (pp. 335-340). IEEE.