Abstract
This paper describes the concepts underlying a new staffing tool, which evaluates staffing requirements, plan future shift sizes, perform sensitivity analysis, and locate and measure improvement opportunities in terms of worker operations. The model is based on M/M/S/K queuing theory to analyze the operator-machine-lot (OML) interference especially in semiconductor manufacturing processes. Unlike classical approaches, in which the machines are treated as customers, here wafer lots are taken as the designated customers to be serviced. A comparison of a simulation, OML, and a traditional M/M/S/K model (where the machines are modeled as customers) shows that OML model yields much closer results to the simulation than the traditional M/M/S/K model. Furthermore, from the computational point of view OML is more efficient than the simulation model which can be very time consuming especially in the complex semiconductor manufacturing environment. Thus, OML model is a superior alternative to the classical interference modeling and facilitates staffing recommendations that improve overall equipment effectiveness (OEE) and therefore productivity.
| Original language | English (US) |
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| Title of host publication | IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | IEEE |
| Pages | 335-340 |
| Number of pages | 6 |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Cambridge, MA, USA Duration: Sep 10 1997 → Sep 12 1997 |
Other
| Other | Proceedings of the 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
|---|---|
| City | Cambridge, MA, USA |
| Period | 9/10/97 → 9/12/97 |
ASJC Scopus subject areas
- General Engineering