SOL-GEL PROCESSING OF PbTiO//3, PbZrO//3, PZT, AND PLZT THIN FILMS.

Thin films were fabricated in the PLZT system by spin casting solutions of complex alkoxides prepared by reacting Pb and La acetates with Zr and Ti alkoxides. Perovskite phases crystallized from bulk gels between 450 degree C-600 degree C depending on composition. Thin coatings of dilute solutions generally resulted in continuous crack-free layers, with good adhesion to silicon and fused silica substrate materials. Thicker films were prepared by multiple deposition techniques. The influence of hydrolysis water content and precursor reactivity on pyrolysis behavior, cracking tendency, and microstructure are discussed.