Simulation of semiconductor manufacturing supply-chain systems with DEVS, MPC, and KIB

Dongping Huang, Hessam Sarjoughian, Wenlin Wang, Gary Godding, Daniel Rivera, Karl G. Kempf, Hans Mittelmann

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

The dynamics of high-volume discrete-part semiconductor manufacturing supply-chain systems can be described using a combination of Discrete EVent System Specification (DEVS) and model predictive control (MPC) modeling approaches. To formulate the interactions between the discrete process model and its controller, another model called Knowledge Interchange Broker (KIB) is used. A robust and scalable testbed supporting DEVS-based manufacturing process modeling, MPC-based controller design, and the KIBdevs/mpc interaction model is developed. A suite of experiments have been devised and simulated using this testbed. The flexibility of this approach for modeling, simulating, and evaluating stochastic discrete process models under alternative control schemes is detailed. The testbed illustrates the benefits and challenges associated with developing and using realistic manufacturing process models and process control policies. The simulation environment demonstrates the importance of explicitly defining and exposing the interactions between the manufacturing and control subsystems of complex semiconductor supply-chain systems.

Original languageEnglish (US)
Article number4773491
Pages (from-to)164-174
Number of pages11
JournalIEEE Transactions on Semiconductor Manufacturing
Volume22
Issue number1
DOIs
StatePublished - Feb 2009

Keywords

  • Discrete-Event System Specification
  • Hybrid simulation testbed
  • Knowledge Interchange Broker (KIB)
  • Model composability
  • Model predictive control
  • Optimization
  • Semiconductor manufacturing
  • Supply-chain management

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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