TY - JOUR
T1 - Simulation of semiconductor manufacturing supply-chain systems with DEVS, MPC, and KIB
AU - Huang, Dongping
AU - Sarjoughian, Hessam
AU - Wang, Wenlin
AU - Godding, Gary
AU - Rivera, Daniel
AU - Kempf, Karl G.
AU - Mittelmann, Hans
N1 - Funding Information:
Manuscript received September 30, 2007; revised September 15, 2008. Current version published February 04, 2009. This work was supported in part by the National Science Foundation under Grant CMMI-0432439 and in part by the Intel Research Council. D. Huang was with the Department of Computer Science and Engineering, Arizona State University, Tempe, AZ 85281 USA. She is now with Microsoft, Inc., Redmond, WA 98052 USA (e-mail: Dongping.huang@microsoft.com). H. Sarjoughian is with the Department of Computer Science and Engineering, Arizona State University, Tempe, AZ 85281 USA (e-mail: sarjoughian@asu. edu; ). W. Wang is with the IT Manufacturing Systems, Freescale Semiconductor, Tempe, AZ 85284 USA (e-mail: Wenlin.Wang@freescale.com). G. Godding and K. Kempf are with Decision Technologies, Intel Corporation, Chandler, AZ 85226 USA (e-mail: gary.godding@intel.com; karl.g.kempf@intel.com). D. Rivera is with the Department of Chemical Engineering, Arizona State University, Tempe, AZ 85287 USA (e-mail: daniel.rivera@asu.edu). H. Mittelmann is with the Mathematics and Statistics Department, Arizona State University, Tempe, AZ 85287 USA (e-mail: mittelmann@math.asu.edu). Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TSM.2008.2011680
PY - 2009/2
Y1 - 2009/2
N2 - The dynamics of high-volume discrete-part semiconductor manufacturing supply-chain systems can be described using a combination of Discrete EVent System Specification (DEVS) and model predictive control (MPC) modeling approaches. To formulate the interactions between the discrete process model and its controller, another model called Knowledge Interchange Broker (KIB) is used. A robust and scalable testbed supporting DEVS-based manufacturing process modeling, MPC-based controller design, and the KIBdevs/mpc interaction model is developed. A suite of experiments have been devised and simulated using this testbed. The flexibility of this approach for modeling, simulating, and evaluating stochastic discrete process models under alternative control schemes is detailed. The testbed illustrates the benefits and challenges associated with developing and using realistic manufacturing process models and process control policies. The simulation environment demonstrates the importance of explicitly defining and exposing the interactions between the manufacturing and control subsystems of complex semiconductor supply-chain systems.
AB - The dynamics of high-volume discrete-part semiconductor manufacturing supply-chain systems can be described using a combination of Discrete EVent System Specification (DEVS) and model predictive control (MPC) modeling approaches. To formulate the interactions between the discrete process model and its controller, another model called Knowledge Interchange Broker (KIB) is used. A robust and scalable testbed supporting DEVS-based manufacturing process modeling, MPC-based controller design, and the KIBdevs/mpc interaction model is developed. A suite of experiments have been devised and simulated using this testbed. The flexibility of this approach for modeling, simulating, and evaluating stochastic discrete process models under alternative control schemes is detailed. The testbed illustrates the benefits and challenges associated with developing and using realistic manufacturing process models and process control policies. The simulation environment demonstrates the importance of explicitly defining and exposing the interactions between the manufacturing and control subsystems of complex semiconductor supply-chain systems.
KW - Discrete-Event System Specification
KW - Hybrid simulation testbed
KW - Knowledge Interchange Broker (KIB)
KW - Model composability
KW - Model predictive control
KW - Optimization
KW - Semiconductor manufacturing
KW - Supply-chain management
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U2 - 10.1109/TSM.2008.2011680
DO - 10.1109/TSM.2008.2011680
M3 - Article
AN - SCOPUS:59849116706
SN - 0894-6507
VL - 22
SP - 164
EP - 174
JO - IEEE Transactions on Semiconductor Manufacturing
JF - IEEE Transactions on Semiconductor Manufacturing
IS - 1
M1 - 4773491
ER -