Abstract

Ramping up a semiconductor wafer fabrication facility is a challenging endeavor. One of the key components of this process is to contract and schedule multiple types of resources in installing and qualifying the capital intensive and sophisticated manufacturing equipment. Due to the stochastic nature of the business environment, equipment shipment delays and activity duration increases are common. We first model the process as a deterministic multi-mode resource-constrained project scheduling problem (MRCPSP) which is NP-hard in the strong sense. Then we extend the classical MRCPSP to handle special aspects of the semiconductor environment such as time-varying resource constraints and resource vacations, alternative resource modes, non-preemptive activity splitting, etc. In this research, a modified Simulated Annealing (SA) algorithm combined with Monte Carlo simulation is proposed to evaluate and improve the execution of the Install/qual schedule with stochastic ready times and activity durations. A case study is provided to demonstrate the approach.

Original languageEnglish (US)
Title of host publicationProceedings - Winter Simulation Conference
DOIs
StatePublished - 2012
Event2012 Winter Simulation Conference, WSC 2012 - Berlin, Germany
Duration: Dec 9 2012Dec 12 2012

Other

Other2012 Winter Simulation Conference, WSC 2012
CountryGermany
CityBerlin
Period12/9/1212/12/12

Fingerprint

Resource-constrained Project Scheduling
Qualification
Semiconductors
Scheduling
Semiconductor materials
Resources
Scheduling Problem
Schedule
Simulated annealing
Vacation
Simulation
Resource Constraints
Simulated Annealing Algorithm
Fabrication
Wafer
Time-varying
NP-complete problem
Monte Carlo Simulation
Manufacturing
Industry

ASJC Scopus subject areas

  • Software
  • Modeling and Simulation
  • Computer Science Applications

Cite this

Simulation-based multi-mode resource-constrained project scheduling of semiconductor equipment installation and qualification. / Cheng, Junzilan; Fowler, John; Kempf, Karl.

Proceedings - Winter Simulation Conference. 2012. 6465247.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cheng, J, Fowler, J & Kempf, K 2012, Simulation-based multi-mode resource-constrained project scheduling of semiconductor equipment installation and qualification. in Proceedings - Winter Simulation Conference., 6465247, 2012 Winter Simulation Conference, WSC 2012, Berlin, Germany, 12/9/12. https://doi.org/10.1109/WSC.2012.6465247
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