TY - GEN
T1 - Simple adaptive controller for an oxidation process
AU - Tsakalis, Konstantinos
AU - Crouch, Peter E.
PY - 1992/12/1
Y1 - 1992/12/1
N2 - In this note we discuss the application of adaptive controller design techniques in a manufacturing process. As an example, we consider the process of oxidation of silicon in dry oxygen. This process consists of a single batch step where silicon wafers are introduced in a chamber and are oxidized for a time period at high temperature. Our objective is to determine the oxidation time such that a prescribed oxide thickness is grown on the silicon.
AB - In this note we discuss the application of adaptive controller design techniques in a manufacturing process. As an example, we consider the process of oxidation of silicon in dry oxygen. This process consists of a single batch step where silicon wafers are introduced in a chamber and are oxidized for a time period at high temperature. Our objective is to determine the oxidation time such that a prescribed oxide thickness is grown on the silicon.
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M3 - Conference contribution
AN - SCOPUS:0027065278
SN - 0780302109
T3 - Proceedings of the American Control Conference
SP - 1023
EP - 1027
BT - Proceedings of the American Control Conference
PB - Publ by American Automatic Control Council
T2 - Proceedings of the 1992 American Control Conference
Y2 - 24 June 1992 through 26 June 1992
ER -