SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses

Jan Lorincik, Klaus Franzreb, Peter Williams

Research output: Contribution to journalArticle

11 Scopus citations

Abstract

A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

Original languageEnglish (US)
Pages (from-to)921-925
Number of pages5
JournalApplied Surface Science
Volume231-232
DOIs
StatePublished - Jun 15 2004

Keywords

  • Ion transmission
  • Monte Carlo
  • SIMION
  • SIMS

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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