SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses

Jan Lorincik; Klaus Franzreb; Peter Williams

doi:10.1016/j.apsusc.2004.03.173

SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses

Jan Lorincik, Klaus Franzreb, Peter Williams

Molecular Sciences, School of (SMS)

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

Original language	English (US)
Pages (from-to)	921-925
Number of pages	5
Journal	Applied Surface Science
Volume	231-232
DOIs	https://doi.org/10.1016/j.apsusc.2004.03.173
State	Published - Jun 15 2004

Keywords

Ion transmission
Monte Carlo
SIMION
SIMS

ASJC Scopus subject areas

General Chemistry
Condensed Matter Physics
General Physics and Astronomy
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2004.03.173

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title = "SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses",

abstract = "A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.",

keywords = "Ion transmission, Monte Carlo, SIMION, SIMS",

author = "Jan Lorincik and Klaus Franzreb and Peter Williams",

note = "Funding Information: This work was supported by NASA Grant NAG5-11899. One of us (K.F.) thanks NSF (Grant CHE0111654) for financial support.",

year = "2004",

month = jun,

day = "15",

doi = "10.1016/j.apsusc.2004.03.173",

language = "English (US)",

volume = "231-232",

pages = "921--925",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

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TY - JOUR

T1 - SIMION modeling of ion optical effects in Cameca ion microanalyzers

T2 - Simulation of ion transmission losses

AU - Lorincik, Jan

AU - Franzreb, Klaus

AU - Williams, Peter

N1 - Funding Information: This work was supported by NASA Grant NAG5-11899. One of us (K.F.) thanks NSF (Grant CHE0111654) for financial support.

PY - 2004/6/15

Y1 - 2004/6/15

N2 - A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

AB - A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

KW - Ion transmission

KW - Monte Carlo

KW - SIMION

KW - SIMS

UR - http://www.scopus.com/inward/record.url?scp=2942586867&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2942586867&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2004.03.173

DO - 10.1016/j.apsusc.2004.03.173

M3 - Article

AN - SCOPUS:2942586867

SN - 0169-4332

VL - 231-232

SP - 921

EP - 925

JO - Applied Surface Science

JF - Applied Surface Science

ER -

SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses

Abstract

Keywords

ASJC Scopus subject areas

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