Abstract
A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 921-925 |
| Number of pages | 5 |
| Journal | Applied Surface Science |
| Volume | 231-232 |
| DOIs | |
| State | Published - Jun 15 2004 |
Fingerprint
Keywords
- Ion transmission
- Monte Carlo
- SIMION
- SIMS
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Surfaces, Coatings and Films
- Condensed Matter Physics
Cite this
SIMION modeling of ion optical effects in Cameca ion microanalyzers : Simulation of ion transmission losses. / Lorincik, Jan; Franzreb, Klaus; Williams, Peter.
In: Applied Surface Science, Vol. 231-232, 15.06.2004, p. 921-925.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - SIMION modeling of ion optical effects in Cameca ion microanalyzers
T2 - Simulation of ion transmission losses
AU - Lorincik, Jan
AU - Franzreb, Klaus
AU - Williams, Peter
PY - 2004/6/15
Y1 - 2004/6/15
N2 - A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.
AB - A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.
KW - Ion transmission
KW - Monte Carlo
KW - SIMION
KW - SIMS
UR - http://www.scopus.com/inward/record.url?scp=2942586867&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=2942586867&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2004.03.173
DO - 10.1016/j.apsusc.2004.03.173
M3 - Article
AN - SCOPUS:2942586867
VL - 231-232
SP - 921
EP - 925
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -