SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses

Jan Lorincik; Klaus Franzreb; Peter Williams

doi:10.1016/j.apsusc.2004.03.173

SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses

Jan Lorincik, Klaus Franzreb, Peter Williams

CLAS-NS: Molecular Sciences, School of (SMS)

Research output: Contribution to journal › Article

11 Scopus citations

Abstract

A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

Original language	English (US)
Pages (from-to)	921-925
Number of pages	5
Journal	Applied Surface Science
Volume	231-232
DOIs	https://doi.org/10.1016/j.apsusc.2004.03.173
State	Published - Jun 15 2004

Keywords

Ion transmission
Monte Carlo
SIMION
SIMS

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1016/j.apsusc.2004.03.173

Fingerprint Dive into the research topics of 'SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses'. Together they form a unique fingerprint.

Cite this

Lorincik, J., Franzreb, K., & Williams, P. (2004). SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses. Applied Surface Science, 231-232, 921-925. https://doi.org/10.1016/j.apsusc.2004.03.173

@article{2fa3b81c30a54d08b4da44b367808825,

title = "SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses",

abstract = "A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.",

keywords = "Ion transmission, Monte Carlo, SIMION, SIMS",

author = "Jan Lorincik and Klaus Franzreb and Peter Williams",

year = "2004",

month = jun,

day = "15",

doi = "10.1016/j.apsusc.2004.03.173",

language = "English (US)",

volume = "231-232",

pages = "921--925",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

}

TY - JOUR

T1 - SIMION modeling of ion optical effects in Cameca ion microanalyzers

T2 - Simulation of ion transmission losses

AU - Lorincik, Jan

AU - Franzreb, Klaus

AU - Williams, Peter

PY - 2004/6/15

Y1 - 2004/6/15

N2 - A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

AB - A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

KW - Ion transmission

KW - Monte Carlo

KW - SIMION

KW - SIMS

UR - http://www.scopus.com/inward/record.url?scp=2942586867&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2942586867&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2004.03.173

DO - 10.1016/j.apsusc.2004.03.173

M3 - Article

AN - SCOPUS:2942586867

VL - 231-232

SP - 921

EP - 925

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

ER -