Abstract
A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.
Original language | English (US) |
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Pages (from-to) | 921-925 |
Number of pages | 5 |
Journal | Applied Surface Science |
Volume | 231-232 |
DOIs | |
State | Published - Jun 15 2004 |
Keywords
- Ion transmission
- Monte Carlo
- SIMION
- SIMS
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films