SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses

Jan Lorincik, Klaus Franzreb, Peter Williams

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

Original languageEnglish (US)
Pages (from-to)921-925
Number of pages5
JournalApplied Surface Science
Volume231-232
DOIs
StatePublished - Jun 15 2004

Fingerprint

transmission loss
International Magnetospheric Study
Ions
ions
simulation
Angular distribution
Monte Carlo method
energy distribution
Monte Carlo methods
angular distribution
Computer simulation

Keywords

  • Ion transmission
  • Monte Carlo
  • SIMION
  • SIMS

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

SIMION modeling of ion optical effects in Cameca ion microanalyzers : Simulation of ion transmission losses. / Lorincik, Jan; Franzreb, Klaus; Williams, Peter.

In: Applied Surface Science, Vol. 231-232, 15.06.2004, p. 921-925.

Research output: Contribution to journalArticle

@article{2fa3b81c30a54d08b4da44b367808825,
title = "SIMION modeling of ion optical effects in Cameca ion microanalyzers: Simulation of ion transmission losses",
abstract = "A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.",
keywords = "Ion transmission, Monte Carlo, SIMION, SIMS",
author = "Jan Lorincik and Klaus Franzreb and Peter Williams",
year = "2004",
month = "6",
day = "15",
doi = "10.1016/j.apsusc.2004.03.173",
language = "English (US)",
volume = "231-232",
pages = "921--925",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",

}

TY - JOUR

T1 - SIMION modeling of ion optical effects in Cameca ion microanalyzers

T2 - Simulation of ion transmission losses

AU - Lorincik, Jan

AU - Franzreb, Klaus

AU - Williams, Peter

PY - 2004/6/15

Y1 - 2004/6/15

N2 - A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

AB - A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f.

KW - Ion transmission

KW - Monte Carlo

KW - SIMION

KW - SIMS

UR - http://www.scopus.com/inward/record.url?scp=2942586867&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2942586867&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2004.03.173

DO - 10.1016/j.apsusc.2004.03.173

M3 - Article

AN - SCOPUS:2942586867

VL - 231-232

SP - 921

EP - 925

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

ER -