Silicon / silicon oxide and silicon / silicon nitride multilayers for X-UV optical applications

P. Boher, Ph Houdy, L. Hennet, J. P. Delaboundiniere, M. Kuhne, P. Muller, Z. G. Li, David Smith

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

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Engineering & Materials Science

Physics & Astronomy