Silicide/Polysilicon Layer Formation Using Dynamic Recoil Mixing

Michael Kozicki, J. M. Robertson, H. Kheyrandish, A. E. Hill

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)873-875
Number of pages3
JournalJournal of the Electrochemical Society
Volume136
Issue number3
DOIs
StatePublished - Mar 1989

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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