Abstract
Periodic arrays of low-aspect ratio silicon nanopillars strongly reduce front surface reflection over a broad wavelength range. In this study, we numerically simulate the reflection of light for thick crystalline silicon substrates nanostructured through a combination of silica nanosphere lithography (SNL) and metal-assisted chemical etching (MaCE), producing ordered arrays of nanopillars with hexagonal periodicity. Using statistical methods, we show that the simulated measurements are in good agreement with the spectrophotometry measurements of the fabricated nanopillars.
Original language | English (US) |
---|---|
Title of host publication | Emerging Silicon Science and Technology |
Publisher | Materials Research Society |
Pages | 31-36 |
Number of pages | 6 |
Volume | 1770 |
ISBN (Electronic) | 9781510826267 |
DOIs | |
State | Published - 2015 |
Event | 2015 MRS Spring Meeting - San Francisco, United States Duration: Apr 6 2015 → Apr 10 2015 |
Other
Other | 2015 MRS Spring Meeting |
---|---|
Country | United States |
City | San Francisco |
Period | 4/6/15 → 4/10/15 |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering