Silica nanosphere lithography defined light trapping structures for ultra-thin si photovoltaics

Natasa Vulic; Jea Young Choi; Christiana Honsberg; Stephen Goodnick

doi:10.1557/opl.2015.548

Silica nanosphere lithography defined light trapping structures for ultra-thin si photovoltaics

Natasa Vulic, Jea Young Choi, Christiana Honsberg, Stephen Goodnick

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Periodic arrays of low-aspect ratio silicon nanopillars strongly reduce front surface reflection over a broad wavelength range. In this study, we numerically simulate the reflection of light for thick crystalline silicon substrates nanostructured through a combination of silica nanosphere lithography (SNL) and metal-assisted chemical etching (MaCE), producing ordered arrays of nanopillars with hexagonal periodicity. Using statistical methods, we show that the simulated measurements are in good agreement with the spectrophotometry measurements of the fabricated nanopillars.

Original language	English (US)
Title of host publication	Emerging Silicon Science and Technology
Editors	Rueben Collins, Zachary Holman, Akira Terakawa, Paul Stradins, Bahman Hekmatshoar
Publisher	Materials Research Society
Pages	31-36
Number of pages	6
ISBN (Electronic)	9781510826267
DOIs	https://doi.org/10.1557/opl.2015.548
State	Published - 2015
Event	2015 MRS Spring Meeting - San Francisco, United States Duration: Apr 6 2015 → Apr 10 2015

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	1770
ISSN (Print)	0272-9172

Other

Other	2015 MRS Spring Meeting
Country/Territory	United States
City	San Francisco
Period	4/6/15 → 4/10/15

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/opl.2015.548

Cite this

Vulic, N., Choi, J. Y., Honsberg, C., & Goodnick, S. (2015). Silica nanosphere lithography defined light trapping structures for ultra-thin si photovoltaics. In R. Collins, Z. Holman, A. Terakawa, P. Stradins, & B. Hekmatshoar (Eds.), Emerging Silicon Science and Technology (pp. 31-36). (Materials Research Society Symposium Proceedings; Vol. 1770). Materials Research Society. https://doi.org/10.1557/opl.2015.548

Silica nanosphere lithography defined light trapping structures for ultra-thin si photovoltaics. / Vulic, Natasa; Choi, Jea Young; Honsberg, Christiana ; Goodnick, Stephen.

Emerging Silicon Science and Technology. ed. / Rueben Collins; Zachary Holman; Akira Terakawa; Paul Stradins; Bahman Hekmatshoar. Materials Research Society, 2015. p. 31-36 (Materials Research Society Symposium Proceedings; Vol. 1770).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Vulic, N, Choi, JY, Honsberg, C & Goodnick, S 2015, Silica nanosphere lithography defined light trapping structures for ultra-thin si photovoltaics. in R Collins, Z Holman, A Terakawa, P Stradins & B Hekmatshoar (eds), Emerging Silicon Science and Technology. Materials Research Society Symposium Proceedings, vol. 1770, Materials Research Society, pp. 31-36, 2015 MRS Spring Meeting, San Francisco, United States, 4/6/15. https://doi.org/10.1557/opl.2015.548

Vulic N, Choi JY, Honsberg C , Goodnick S. Silica nanosphere lithography defined light trapping structures for ultra-thin si photovoltaics. In Collins R, Holman Z, Terakawa A, Stradins P, Hekmatshoar B, editors, Emerging Silicon Science and Technology. Materials Research Society. 2015. p. 31-36. (Materials Research Society Symposium Proceedings). https://doi.org/10.1557/opl.2015.548

Vulic, Natasa ; Choi, Jea Young ; Honsberg, Christiana ; Goodnick, Stephen. / Silica nanosphere lithography defined light trapping structures for ultra-thin si photovoltaics. Emerging Silicon Science and Technology. editor / Rueben Collins ; Zachary Holman ; Akira Terakawa ; Paul Stradins ; Bahman Hekmatshoar. Materials Research Society, 2015. pp. 31-36 (Materials Research Society Symposium Proceedings).

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Silica nanosphere lithography defined light trapping structures for ultra-thin si photovoltaics

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