TY - GEN
T1 - Silica nanosphere lithography defined light trapping structures for ultra-thin si photovoltaics
AU - Vulic, Natasa
AU - Choi, Jea Young
AU - Honsberg, Christiana
AU - Goodnick, Stephen
N1 - Publisher Copyright:
© 2015 Materials Research Society.
PY - 2015
Y1 - 2015
N2 - Periodic arrays of low-aspect ratio silicon nanopillars strongly reduce front surface reflection over a broad wavelength range. In this study, we numerically simulate the reflection of light for thick crystalline silicon substrates nanostructured through a combination of silica nanosphere lithography (SNL) and metal-assisted chemical etching (MaCE), producing ordered arrays of nanopillars with hexagonal periodicity. Using statistical methods, we show that the simulated measurements are in good agreement with the spectrophotometry measurements of the fabricated nanopillars.
AB - Periodic arrays of low-aspect ratio silicon nanopillars strongly reduce front surface reflection over a broad wavelength range. In this study, we numerically simulate the reflection of light for thick crystalline silicon substrates nanostructured through a combination of silica nanosphere lithography (SNL) and metal-assisted chemical etching (MaCE), producing ordered arrays of nanopillars with hexagonal periodicity. Using statistical methods, we show that the simulated measurements are in good agreement with the spectrophotometry measurements of the fabricated nanopillars.
UR - http://www.scopus.com/inward/record.url?scp=84961680435&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84961680435&partnerID=8YFLogxK
U2 - 10.1557/opl.2015.548
DO - 10.1557/opl.2015.548
M3 - Conference contribution
AN - SCOPUS:84961680435
T3 - Materials Research Society Symposium Proceedings
SP - 31
EP - 36
BT - Emerging Silicon Science and Technology
A2 - Collins, Rueben
A2 - Holman, Zachary
A2 - Terakawa, Akira
A2 - Stradins, Paul
A2 - Hekmatshoar, Bahman
PB - Materials Research Society
T2 - 2015 MRS Spring Meeting
Y2 - 6 April 2015 through 10 April 2015
ER -