Abstract

We demonstrate the combination of biomineralized hierarchichal nanopore structures with microfabricated silicon devices. The nanopore membranes can be used for counting and sizing of nanoparticles using ionic current monitoring as well as particle separation.

Original languageEnglish (US)
Title of host publicationIMAPS International Conference and Exhibition on Device Packaging - In Conjunction with the Global Business Council, GBC 2011 Spring Conference
Pages74-76
Number of pages3
StatePublished - 2011
EventIMAPS International Conference and Exhibition on Device Packaging - In Conjunction with the Global Business Council, GBC 2011 Spring Conference - Scottsdale/Fountain Hills, AZ, United States
Duration: Mar 7 2011Mar 10 2011

Other

OtherIMAPS International Conference and Exhibition on Device Packaging - In Conjunction with the Global Business Council, GBC 2011 Spring Conference
CountryUnited States
CityScottsdale/Fountain Hills, AZ
Period3/7/113/10/11

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Keywords

  • Biomineralization
  • Nanopore membranes
  • Silicon microfabrication

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Goryll, M., Wang, X., Ramakrishnan, S., Lin, K. C., Rege, K., Dey, S., & Ramakrishna, B. L. (2011). Silica diatom nanopore membranes combined with silicon MEMS. In IMAPS International Conference and Exhibition on Device Packaging - In Conjunction with the Global Business Council, GBC 2011 Spring Conference (pp. 74-76)