Shock protection using integrated nonlinear spring shock stops

S. W. Yoon, N. Yazdi, J. Chae, N. C. Perkins, K. Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations

Abstract

This paper reports the fabrication and testing of integrated nonlinear spring shock stops to protect micromachined devices. This approach enables a generic batch micro-packaging technology providing superior shock protection over conventional hard shock stops, and can be conveniently integrated with micromachined devices without additional fabrication processes and excessive area expansion. These advantages are demonstrated by integrating the nonlinear spring shock stops with a capacitive and with a piezoresistive MEMS accelerometer fabricated by different processes. Conducted shock tests reveal that the nonlinear stops provide substantial device survival rate (83%) compared with hard stops (8%). The device fracture mechanisms are also identified

Original languageEnglish (US)
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages702-705
Number of pages4
StatePublished - Oct 24 2006
Externally publishedYes
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: Jan 22 2006Jan 26 2006

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period1/22/061/26/06

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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